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US 2019/0096641 A1Published application
Method of Real Time In-Situ Chamber Condition Monitoring Using Sensors and Rf Communication
AssigneeApplied Materials, Inc.
InventorsLawrence Wong, Kartik Ramaswamy, Yang Yang, Steven Lane, Richard Fovell
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Abstract
Plural sensors on an interior surface of a reactor chamber are linked by respective RF communication channels to a hub inside the reactor chamber, which in turn is linked to a process controller outside of the chamber.
Claims15
A method of processing a workpiece in a chamber of a reactor having a process controller outside of the chamber and governing process parameters in the chamber, comprising:
- placing a workpiece into the chamber so that the workpiece rests on a support;
- monitoring the workpiece using plural sensors secured to the chamber and fixed in locations inside the chamber, each sensor having a wireless transceiver;
- establishing respective independent wireless communication channels between a wireless communication hub inside the chamber and respective wireless transceivers of the plural sensors;
- transmitting measurements by each respective sensor from the wireless transceiver of the respective sensor to the wireless communication hub;
- and
- transmitting the measurements from the wireless communication hub inside the chamber to the process controller outside the chamber.
3 more elements
Dependencies are inferred from the claim text.