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US 2019/0096629 A1Published application
A corrector structure and a method for correcting aberration of an annular focused charged-particle beam
AssigneeNational University of Singapore
InventorAnjam KHURSHEED
Life of this patent
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Abstract
A corrector structure and a method for correcting aberration of an annular focused charged-particle beam, the corrector structure comprising a plurality of lenses configured for reducing second-order geometric aberration in the charged-particle beam.
Claims19
A corrector structure for correcting aberration of an annular focused charged-particle beam, the corrector structure comprising a plurality of lenses configured for reducing second-order geometric aberration in the charged-particle beam.
A method for correcting aberration of an annular focused charged-particle beam, the method comprising:
- providing a plurality of lenses;
- and
- configuring the lenses for reducing second-order geometric aberration in the charged-particle beam.
Dependencies are inferred from the claim text.