Metrology method and device
AssigneesAsml Holding N.V., ASML Netherlands B.V.
InventorsYevgeniy Konstantinovich Shmarev, Nitesh Pandey, Armand Eugene Albert Koolen
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Abstract
An inspection apparatus, including: an objective configured to receive diffracted radiation from a metrology target having positive and negative diffraction order radiation; an optical element configured to separate the diffracted radiation into portions separately corresponding to each of a plurality of different values or types of one or more radiation characteristics and separately corresponding to the positive and negative diffraction orders; and a detector system configured to separately and simultaneously measure the portions.
Claims22
An inspection apparatus, comprising:
- an objective configured to receive diffracted radiation from a metrology target having positive and negative diffraction order radiation;
- an optical element configured to separate the diffracted radiation into portions separately corresponding to each of a plurality of different values or types of one or more radiation characteristics and separately corresponding to the positive and negative diffraction orders;
- and
- a detector system configured to separately and simultaneously measure the portions.
A method comprising:
- receiving diffracted radiation from a metrology target having positive and negative diffraction order radiation;
- separating the diffracted radiation into portions corresponding to each of a plurality of different values or types of one or more radiation characteristics and to the positive and negative diffraction orders;
- and
- separately and simultaneously measuring the portions.
A method comprising:
- illuminating a metrology target with an illumination beam spot, wherein the metrology target comprises a plurality of different types of periodic structures and wherein, within the spot, there is only one type of periodic structure along a particular direction within the spot;
- receiving radiation from the metrology target;
- and
- separating the received radiation into portions corresponding to each of a plurality of different values or types of one or more radiation characteristics.
Dependencies are inferred from the claim text.