Radiation-sensitive composition and pattern-forming method

Abstract

A radiation-sensitive composition includes: particles including a metal oxide as a principal component; an aggregation inhibiting agent for inhibiting aggregation of the particles; and an organic solvent. The aggregation inhibiting agent is preferably a compound having dehydration ability. The compound having dehydration ability is preferably a carboxylic anhydride, an orthocarboxylic acid ester, a carboxylic acid halide or a combination thereof. As the aggregation inhibiting agent, a compound that is capable of coordinating to a metal atom is also preferred. The compound is preferably represented by formula (1). In the formula (1), R1 represents an organic group having a valency of n; X represents —OH, —COOH, —NCO, —NHRa, —COORA or —CO—C(RL)2—CO—RA; and n is an integer of 1 to 4. The content of the aggregation inhibiting agent with respect to 100 parts by mass of the particles is preferably no less than 0.001 parts by mass. R1X)n  (1)

Dependencies are inferred from the claim text.