Hermetic sealing of a nonlinear crystal for use in a laser system
AssigneeKLA-Tencor Corporation
InventorsRajeev Patil, David Ramirez, Yevgeniy Churin, William Replogle
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AssigneeKLA-Tencor Corporation
InventorsRajeev Patil, David Ramirez, Yevgeniy Churin, William Replogle
Estimating the term…
Disclosed are methods and apparatus for hermetically sealing a nonlinear optical (NLO) crystal for use in a laser system. A mounted NLO crystal, an enclosure base, a lid, and a plurality of window components are moved into an oven. A vacuum bake process is then performed on the mounted NLO crystal, enclosure base, lid, and plurality of window components until a humidity level that is less than a predefined amount is reached. The mounted NLO crystal, enclosure base, lid, and plurality of window components are moved from the oven onto a stage of a glove box that includes a sealing tool. In the glove box, the mounted NLO crystal is hermetically sealed into the enclosure base by sealing the lid and plurality of window components into openings of the enclosure base.
A system for hermetically sealing a nonlinear optical (NLO) crystal for use in a laser system, comprising:
A method of hermetically sealing a nonlinear optical (NLO) crystal for use in a laser system, comprising:
Dependencies are inferred from the claim text.