Backplane substrate including in-cell type touch panel, liquid crystal display device using the same, and method of manufacturing the same

A method of manufacturing a backplane substrate including an in-cell type touch panel, comprising:

• preparing a substrate comprising a plurality of pixels in a matrix;
• providing a thin film transistor at each pixel of the substrate;
• forming a first interlayer dielectric layer to cover the thin film transistor;
• forming a sensing line on the first interlayer dielectric layer;
• forming a second interlayer dielectric layer on the first interlayer dielectric layer to cover the sensing line;
• forming a common electrode at each block including some pixels of a plurality of pixels, to overlap the sensing line;
• forming a third interlayer dielectric layer to cover the common electrode;
• forming a first interlayer contact hole passing through the third interlayer dielectric layer, the second interlayer dielectric layer, and the first interlayer dielectric layer to expose a part of the thin film transistor at each pixel, and a second interlayer contact hole corresponding to a sidewall of the common electrode adjacent to an overlapping part of the sensing line and the common electrode, the second interlayer contact hole passing through the third interlayer dielectric layer and the second interlayer dielectric layer to expose the sensing line;
• and
• forming a pixel electrode connected to the thin film transistor through the first interlayer contact hole, and a connection pattern connected to the sensing line through the second interlayer contact hole.