Immersion matrix, its use and immersion device
AssigneeCarl Zeiss Microscopy GmbH
InventorsThomas Ohrt, Thomas Kalkbrenner
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Abstract
The invention relates to an immersion matrix (5), designed for adjusting optical properties at interfaces of optical arrangements, having a porosity with pores of at least one pore size selected from a range from >20 nm to 200 μm and/or nanopores in the material of the immersion matrix (5), wherein the nanopores have at least one average pore size selected from a range of 0.5 nm to 20 nm, and an elasticity modulus E selected from a range of 0.1-100 MPa. The invention furthermore relates to the use of the immersion matrix (5), an arrangement with the immersion matrix and an immersion device.
Claims22
1-16. (canceled)
An apparatus comprising:
- an immersion matrix for adjusting optical properties to interfaces of optical arrangements, the immersion matrix including a material having a porosity with pores having an average pore size selected from a range of 20 nm to 200 μm in the material of the immersion matrix.
A microscopy method comprising:
- providing illumination radiation to a sample;
- and
- receiving detection radiation from the sample in response to the illumination radiation interacting with the sample,
- wherein the illumination radiation and/or detection radiation is/are directed through an immersion matrix that includes a material having a porosity with pores having an average pore size selected from a range of 20 nm to 200 μm in the material of the immersion matrix.
Dependencies are inferred from the claim text.