Physical Quantity Measurement Device, Electronic Apparatus, And Vehicle
AssigneeSeiko Epson Corporation
InventorYutaka TAKADA
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AssigneeSeiko Epson Corporation
InventorYutaka TAKADA
Estimating the term…
A physical quantity measurement device includes a sensor element having a coupling capacitance formed between a drive electrode and a detection electrode, and a circuit device having a drive circuit adapted to supply a drive signal to the drive electrode, a detection circuit adapted to detect physical quantity information corresponding to a physical quantity based on a detection signal from the detection electrode, and a fault diagnosis circuit, and the fault diagnosis circuit has an electrostatic leakage component extraction circuit adapted to extract an electrostatic leakage component due to the coupling capacitance from one of the detection signal and an amplified signal of the detection signal, and performs a fault diagnosis based on the electrostatic leakage component extracted.
A physical quantity measurement device comprising:
Dependencies are inferred from the claim text.