MEMS Device, Electronic Apparatus, And Vehicle
AssigneeSeiko Epson Corporation
InventorFumiya ITO
Life of this patent
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Abstract
A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.
Claims20
A MEMS device comprising:
- a base including a support portion and a fixed electrode;
- a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode;
- and
- an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface, wherein
- the abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.
Dependencies are inferred from the claim text.