Accelerator sensor and accelerometer
AssigneesBoe Technology Group Co., Ltd., Beijing Boe Optoelectronics Technology Co., Ltd.
InventorTingfeng Huang
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Abstract
This disclosure discloses an acceleration sensor and an accelerometer, and the acceleration sensor includes a base, a cantilever, and a mass body fixed on the base through the cantilever, where the shape of the mass body is a centrally symmetric shape; and the cantilever includes four L-shaped arms, where the respective L-shaped arms include long arms connected with the base, and short arms connected with the mass body, and any adjacent two of the L-shaped arms are arranged symmetric to an axis. Since the cantilever includes the four symmetrically arranged L-shaped arms holding each other transversally, there is high transversal interference robustness, the structure is simple, and there is low fabrication difficulty.
Claims16
An acceleration sensor, comprising a base, a cantilever, and a mass body fixed on the base through the cantilever, wherein:
- a shape of the mass body is a centrally symmetric shape;
- and
- the cantilever comprises four L-shaped arms, wherein the respective L-shaped arms comprise a long arm connected with the base, and a short arm connected with the mass body, and any adjacent two of the L-shaped arms are arranged symmetric to an axis.
Dependencies are inferred from the claim text.