Membrane Device, Measurement Device, and Method for Producing Membrane Device

A measuring device that measures physical properties of a sample, the measuring device comprising:

• a measuring unit that accommodates the sample;
• first and second chambers;
• a first electrode that applies a voltage to an aqueous solution accommodated in the first chamber;
• and
• a second electrode that applies a voltage to an aqueous solution accommodated in the second chamber,
• wherein the measuring unit includes
• a Si substrate,
• a membrane disposed on the Si substrate, and
• a semiconductor layer which is formed of polysilicon or amorphous silicon and is disposed on the membrane,
• wherein the semiconductor layer includes a first hole penetrating to a depth reaching the membrane,
• wherein the Si substrate includes a second hole penetrating to a depth reaching the membrane,
• wherein the membrane is disposed in a position where the first hole and the second hole are separated from each other by the membrane, and
• wherein a first insulating film is disposed on a side wall of the first hole.

A method of manufacturing a membrane device, the method comprising:

• stacking a membrane on a Si substrate;
• stacking a semiconductor layer formed of polysilicon or amorphous silicon on the membrane;
• forming a first hole penetrating to a depth reaching the membrane on the semiconductor layer;
• and
• forming a second hole penetrating to the depth reaching the membrane on the Si substrate,
• wherein the membrane is disposed in a position where the first hole and the second hole are separated from each other by the membrane,
• the method further comprising forming a first insulating film on a side wall of the first hole.