Flaw inspection device and flaw inspection method
AssigneeHitachi High-Technologies Corporation
InventorsToshifumi HONDA, Takahiro URANO, Mamoru KOBAYASHI, Hisashi HATANO, Hironori SAKURAI
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Abstract
The present invention aims at providing a defect inspection technique capable of setting parameters used for detecting a defect with a less burden to a user. A defect inspection device according to the present invention receives multiple reference values input by the user and calculates a defect extraction condition so as to optimize an evaluation value calculated with the use of the reference values, the number of actual reports, and the number of false reports (refer to FIG. 8).
Claims15
A defect inspection device for inspecting a defect of an inspection target, comprising:
- an image generation unit that generates an exterior image of the inspection target;
- a feature amount calculation unit that calculates a feature amount of the exterior image;
- a storage unit that stores extraction condition data describing an initial value of a condition for extracting the defect of the inspection target;
- a defect determination unit that compares the feature amount with the condition to extract the defect of the inspection target;
- an output unit that outputs information representing the defect extracted by the defect determination unit;
- and
- an interface that receives a designation input for designating whether the defect extracted by the defect determination unit is an actual report or a false report,
- wherein the defect determination unit receives a plurality of reference values through the interface and calculates the condition under which an evaluation value calculated using the number of actual reports, the number of false reports, and the reference values becomes optimum for each of the reference values,
- the defect determination unit extracts the defect of the inspection target by using the condition calculated for each of the reference values, and
- the output unit outputs the condition calculated by the defect determination unit for each of the reference values for each of the reference values and outputs the defects extracted using the conditions calculated for each of the reference values and outputs information representing the extracted defect by using the condition calculated by the defect determination unit for each of the reference values.
A defect inspection method for inspecting a defect of an inspection target, comprising:
- an image generation step of generating an exterior image of the inspection target;
- a feature amount calculation step of calculating a feature amount of the exterior image;
- a step of reading detection condition data describing an initial value of a condition for extracting the defect of the inspection target from a storage unit;
- a defect determination step of comparing the feature amount with the condition to extract the defect of the inspection target,
- an output step of outputting information representing the defect extracted in the defect determination step, and
- a step of receiving a designation input for designating whether the defect extracted in the defect determination step is an actual report or a false report,
- wherein the defect determination step further receives a plurality of reference values and calculates the condition under which an evaluation value calculated using the number of actual reports, the number of false reports, and the reference values becomes optimum for each of the reference values,
- the defect determination step further extracts the defect of the inspection target by using the condition calculated for each of the reference values, and
- the output step further outputs the condition calculated in the defect determination step for each of the reference values and outputs information representing the defect extracted in the defect determination step by using the condition calculated for each of the reference values.
Dependencies are inferred from the claim text.