Observation apparatus and observation method
AssigneeNikon Corporation
InventorNaoki FUKUTAKE
Life of this patent
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Abstract
An observation apparatus in this embodiment includes a light source configured to irradiate an observation target with light, and a processing unit configured to generate an image based on Rayleigh scattered light derived from χ(3) included in light obtained from the observation target.
Claims20
An observation apparatus, comprising:
- a light source configured to irradiate an observation target with light;
- and
- a processing unit configured to generate an image based on Rayleigh scattered light derived from χ(3) included in light obtained from the observation target.
An observation apparatus, comprising:
- a light source configured to irradiate an observation target with light;
- and
- a detecting unit configured to at least partially block light derived from χ(1) and detect Rayleigh scattered light derived from χ(3), the Rayleigh scattered light derived from χ(3) and the light derived from χ(1) being included in the light obtained from the observation target.
An observation method, comprising generating an image based on Rayleigh scattered light derived from χ(3) included in light obtained from an observation target irradiated with light from a light source.
An observation method, comprising at least partially blocking light derived from χ(1) and detecting Rayleigh scattered light derived from χ(3), the Rayleigh scattered light derived from χ(3) and the light derived from χ(1) being included in light obtained from an observation target irradiated with light from a light source.
An observation apparatus, comprising:
- a light source configured to irradiate an observation target with excitation light;
- at least one light splitting unit arranged on an optical path of light obtained from the observation target and configured to split the light into beams of light;
- at least two mirrors capable of adjusting an optical path length difference between the beams of light from the light splitting unit;
- and
- a detector configured to detect Rayleigh scattered light derived from χ(3) included in the beams of light reflected by the at least two mirrors, wherein
- the beams of light from the light splitting unit are combined after reflected by the at least two mirrors, and
- the detector detects the Rayleigh scattered light derived from χ(3) included in combined light.
Dependencies are inferred from the claim text.