Confocal Displacement Measurement Device And A Confocal Thickness Measurement Device

A confocal displacement measurement device comprising:

• a laser light source configured to emit a laser light;
• a phosphor optically coupled to the laser light source, and configured to be excited by the laser light to emit a multi-wavelength light;
• a light source optical condenser disposed on an optical path of the laser light, and configured to concentrate the laser light toward the phosphor;
• an optical fiber unit defining a common optical path, a first optical path coupled to the common optical path via a splitter, and a second optical path coupled to the common optical path via the splitter, having a first end of the first optical path optically coupled to the phosphor, a second end of the common optical path, and a third end of the second optical path, and configured to receive the multi-wavelength light emitted by the phosphor from the first end, to guide the multi-wavelength light from the first end to the second end through the first optical path and the common optical path, and to guide a measurement light toward the third end through the common optical path and the second optical path;
• an optical head having a first lens, configured to concentrate the multi-wavelength light emitted from the second end disposed on a confocal position toward a measurement object to respective positions along an optical axis according to the wavelength of each of the multi-wavelength light by passing through the first lens, and to concentrate, as the measurement light, a reflected light from the measurement object toward the second end;
• a light receiving element that selectively receives the measurement light passing through the second end, the common optical path, the second optical path and the third end from the measurement object according to wavelength and photoelectrically converts the measurement light to a signal corresponding to a light receiving amount;
• and
• a measurement controller that measures a displacement of the measurement object on the basis of the signal indicating the light receiving amount corresponding to the wavelength from the light receiving element.

A confocal thickness measurement device comprising:

• a laser light source configured to emit a laser light;
• a phosphor optically coupled to the laser light source, and configured to be excited by the laser light to emit a multi-wavelength light;
• a light source optical condenser disposed on an optical path of the laser light, and configured to concentrate the laser light toward the phosphor;
• an optical fiber unit defining a common optical path, a first optical path coupled to the common optical path via a splitter, and a second optical path coupled to the common optical path via the splitter, having a first end of the first optical path optically coupled to the phosphor, a second end of the common optical path, and a third end of the second optical path, and configured to receive the multi-wavelength light emitted by the phosphor from the first end, to guide the multi-wavelength light from the first end to the second end through the first optical path and the common optical path, and to guide a measurement light toward the third end through the common optical path and the second optical path;
• an optical head having a first lens, configured to concentrate the multi-wavelength light emitted from the second end disposed on a confocal position toward a measurement object to respective positions along an optical axis according to the wavelength of each of the multi-wavelength light by passing through the first lens, and to concentrate, as the measurement light, a reflected light from the measurement object toward the second end;
• a light receiving element that selectively receives the measurement light passing through the second end, the common optical path, the second optical path and the third end from the measurement object according to wavelength and photoelectrically converts the measurement light to a signal corresponding to a light receiving amount;
• and
• a measurement controller that measures a thickness of the measurement object on the basis of the signal indicating the light receiving amount corresponding to the wavelength from the light receiving element.