A three-dimensional measurement device, comprising:
- an optical system that splits incident light into two lights, radiates one of the two lights as measurement light to a measurement object and the other of the two lights as reference light to a reference surface, and recombines the two lights to emit combined light;
- a first irradiation unit that emits first light entering the optical system;
- a second irradiation unit that emits second light entering the optical system;
- a first imaging unit into which output light that is obtained from the first light and is emitted from the optical system enters;
- a second imaging unit into which output light that is obtained from the second light and is emitted from the optical system enters;
- and
- an image processor that executes three-dimensional measurement of the measurement object, based on interference fringe images taken by the first imaging unit and the second imaging unit, wherein
- the first light and the second light enter different positions of the optical system, and
- the output light obtained from the first light and the output light obtained from the second light are emitted from different positions of the optical system, wherein
- the first irradiation unit comprises at least one of:
- a first wavelength light emitter that emits first wavelength light comprising polarized light of a first wavelength;
- and a second wavelength light emitter that emits second wavelength light comprising polarized light of a second wavelength, and emits the first light including at least one of the polarized light of the first wavelength and the polarized light of the second wavelength,
- the second irradiation unit comprises at least one of a third wavelength light emitter that emits third wavelength light comprising polarized light of a third wavelength;
- and a fourth wavelength light emitter that emits fourth wavelength light comprising polarized light of a fourth wavelength, and emits the second light including at least one of the polarized light of the third wavelength and the polarized light of the fourth wavelength,
- the first imaging unit comprises at least one of:
- a first wavelength light imaging unit that takes an image of output light obtained from the polarized light of the first wavelength, wherein the polarized light of the first wavelength is included in the output light obtained from the first light emitted from the optical system, when the first light including the polarized light of the first wavelength enters the optical system;
- and
- a second wavelength light imaging unit that takes an image of output light obtained from the polarized light of the second wavelength, wherein the polarized light of the second wavelength is included in the output light obtained from the first light emitted from the optical system, when the first light including the polarized light of the second wavelength enters the optical system, and
- the second imaging unit comprises at least one of:
- a third wavelength light imaging unit that takes an image of output light obtained from the polarized light of the third wavelength, wherein the polarized light of the third wavelength is included in the output light obtained from the second light emitted from the optical system, when the second light including the polarized light of the third wavelength enters the optical system;
- and
- a fourth wavelength light imaging unit that takes an image of output light obtained from the polarized light of the fourth wavelength, wherein the polarized light of the fourth wavelength is included in the output light obtained from the second light emitted from the optical system, when the second light including the polarized light of the fourth wavelength enters the optical system.