Piezoelectric valve, method for driving piezoelectric valve, and optical particulate separator equipped with air-jet means using piezoelectric valve
AssigneesSatake Corporation, Mechano Transformer Corporation
InventorsTakafumi ITO, Hironori ARII, Tadashi MATSUSHITA, Sze Keat CHEE, Takeshi YANO, Toshiro HIGUCHI
Life of this patent
Estimating the term…