Dispensing valve apparatus
AssigneeShin-Etsu Chemical Co., Ltd.
InventorYuichi Hamada
Life of this patent
Estimating the term…
Abstract
A dispensing valve apparatus with less fluctuation in the dispensing rate is provided. The dispensing valve apparatus is a dispensing valve apparatus that closes off a fluid by a valve member and a valve member seat making contact with each other and is characterized in that a section of the valve member seat making contact with the valve member is made of a material having a tensile elastic modulus of 2 GPa or greater. Alternatively, the dispensing valve apparatus is a dispensing valve apparatus that closes off the fluid by the valve member and the valve member seat making contact with each other and is characterized in that the section of the valve member seat making contact with the valve member is made of a material having a compressive elastic modulus of 2 GPa or greater.
Claims5
A dispensing valve apparatus that closes off a fluid by a valve member and a valve member seat making contact with each other, characterized in that a section of the valve member seat making contact with the valve member is made of a material having a tensile elastic modulus of 2 GPa or greater.
A dispensing valve apparatus that closes off a fluid by a valve member and a valve member seat making contact with each other, characterized in that a section of the valve member seat making contact with the valve member is made of a material having a compressive elastic modulus of 2 GPa or greater.
Dependencies are inferred from the claim text.