Elastic wave device and manufacturing method for same
AssigneeMurata Manufacturing Co., Ltd.
InventorTakuya KOYANAGI
Life of this patent
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Abstract
An elastic wave device includes an IDT electrode on a piezoelectric substrate to define a longitudinally coupled resonator elastic wave filter, a three-dimensional wiring portion on the piezoelectric substrate and connected to the longitudinally coupled resonator elastic wave filter, and a cover surrounding the longitudinally coupled resonator elastic wave filter on the piezoelectric substrate. The three-dimensional wiring portion includes a lower layer wiring line, an upper layer wiring line, and an insulating layer stacked between the lower layer wiring line and the upper layer wiring line. The cover includes a portion on the three-dimensional wiring portion.
Claims16
An elastic wave device comprising:
- an element substrate that has piezoelectricity;
- an IDT electrode provided on the element substrate and defining a longitudinally coupled resonator elastic wave filter;
- a first three-dimensional wiring portion and a second three-dimensional wiring portion provided on the element substrate and connected to the longitudinally coupled resonator elastic wave filter;
- and
- a first cover that covers the longitudinally coupled resonator elastic wave filter, and includes a recessed shape that opens toward the longitudinally coupled resonator elastic wave filter, and a first opening edge portion defined by one edge portion of the recessed shape and a second opening edge portion defined by another edge portion of the recessed shape;
- wherein
- the longitudinally coupled resonator elastic wave filter is disposed between the first three-dimensional wiring portion and the second three-dimensional wiring portion in a direction perpendicular or substantially perpendicular to an elastic wave propagation direction of the longitudinally coupled resonator elastic wave filter;
- the first opening edge portion of the first cover is positioned on the first three-dimensional wiring portion;
- and
- the second opening edge portion of the first cover is positioned on the second three-dimensional wiring portion.
Dependencies are inferred from the claim text.