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US 2019/0079503 A1Published application
System and method for automating user interaction for semiconductor manufacturing equipment
AssigneeLam Research Corporation
InventorsRainer UNTERGUGGENBERGER, Henry CHAN, Chung-Ho HUANG, Vincent WONG, David HEMKER
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Abstract
A system includes an interface and a controller. The interface is configured to receive a state a substrate processing tool comprising a plurality of process modules configured to process a substrate. The controller is configured to correlate the state with an input previously received by the substrate processing tool from the interface based on the state and to generate an output to control the substrate processing tool based on the correlation.
Claims33
A system comprising:
- an interface to receive a state a substrate processing tool comprising a plurality of process modules configured to process a substrate;
- and
- a controller to correlate the state with an input previously received by the substrate processing tool from the interface based on the state and to generate an output to control the substrate processing tool based on the correlation.
A method comprising:
- receiving a state a substrate processing tool comprising a plurality of process modules configured to process a substrate;
- correlating the state with an input previously received by the substrate processing tool based on the state;
- and
- generating an output to control the substrate processing tool based on the correlation.
1 more element
A system comprising:
- a processor;
- and
- machine readable instructions, stored on a tangible machine readable medium, when executed by the processor, configure the processor to:
- receive a state a substrate processing tool comprising a plurality of process modules configured to process a substrate;
- correlate the state with an input previously received by the substrate processing tool based on the state;
- and
- generate an output to control the substrate processing tool based on the correlation.
4 more elements
Dependencies are inferred from the claim text.