Bearing assembly for a lithography system, and lithography system
AssigneeCarl Zeiss SMT GmbH
InventorPascal Marsollek
Life of this patent
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Abstract
The disclosure relates to a bearing assembly for a lithography system, having an optical element, a base, and a bearing device that moveably supports the optical element relative to the base. The bearing device has at least one torsion decoupling element that reduces a transmission of torsional moments between the optical element and the base. The torsion decoupling element has at least two leaf springs which have respective opposing narrow sides and which bring about torsional moments about an axis perpendicular to the narrow sides. The at least two leaf springs are also positioned at an angle to one another and are coupled to one another in such a way that a force flow through the torsion decoupling element simultaneously flows through the at least two leaf springs.
Claims20
A bearing arrangement, comprising:
- an optical element;
- a base;
- and
- a bearing device configured to movably mount the optical element relative to the base,
- wherein:
- the bearing device comprises a torsion-decoupling element configured to reduce a transmission of torsional moments between the optical element;
- the torsion-decoupling element comprises first and second leaf springs;
- each of the first and second leaf springs has mutually opposing narrow sides;
- the torsional moments act about an axis that is perpendicular to the narrow sides;
- the first and second leaf springs are at an angle to each other;
- the first and second leaf springs are mechanically connected in parallel;
- the first and second leaf springs are coupled to each other so that a force flow through the torsion-decoupling element simultaneously flows through the first and second leaf springs;
- the torsion-decoupling element comprises first and second hollow cylindrical portions;
- a first tongue is defined at the first hollow cylindrical portion;
- a second tongue is defined at the second hollow cylindrical portion;
- the tongue protrudes into the second hollow cylindrical portion;
- and
- the first tongue is connected to the second hollow cylindrical portion via the first and second leaf springs.
Dependencies are inferred from the claim text.