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US 2019/0070521 A1Published application
Method, system, and device for delivery of process gas
AssigneeRASIRC, Inc.
InventorsDaniel Alvarez, JR., Russell J. Holmes, Jeffrey J. Spiegelman, Edward Heinlein, Christopher Ramos, Jeremiah Trammel
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Abstract
Provided herein are methods, systems, and devices for the vapor phase delivery of high purity process gases to a critical process or application.
Claims19
A method comprising:
- (a) providing a non-aqueous solution comprising a process chemical and a solvent in a device configured to contain a liquid and a vapor phase, wherein the non-aqueous solution has a vapor phase comprising an amount of anhydrous vapor of the process chemical;
- (b) contacting a carrier gas or vacuum with the vapor phase to form a gas stream;
- and
- (c) delivering the gas stream comprising the anhydrous vapor to a critical process or application,
- wherein the process chemical is hydrazine or hydrogen peroxide and wherein the solvent is selected from the group consisting of ethylene glycol, triethylene glycol, α-propylene glycol, β-propylene glycol, 1,3-Dimethyl-3,4,5,6-tetrahydro-2(1H)-pyrimidinone (DMPU), 1,3-Dimethyl-2-imidazolidinone (DMEU), and tetramethylurea.
2 more elements
A chemical delivery system comprising:
- (a) a device configured to contain a liquid and a vapor phase;
- (b) a non-aqueous solution comprising a process chemical and a solvent provided in the device, wherein the non-aqueous solution has a vapor phase comprising an amount of anhydrous vapor of the process chemical;
- (c) a carrier gas or vacuum in fluid contact with the vapor phase and configured to form a gas stream containing the anhydrous vapor,
- wherein the process chemical is hydrazine or hydrogen peroxide, wherein the device has an outlet configured to deliver the gas stream to a critical process or application, and wherein the solvent is selected from the group consisting of ethylene glycol, triethylene glycol, α-propylene glycol, β-propylene glycol, 1,3-Dimethyl-3,4,5,6-tetrahydro-2(1H)-pyrimidinone (DMPU), 1,3-Dimethyl-2-imidazolidinone (DMEU), and tetramethylurea.
1 more element
Dependencies are inferred from the claim text.