Measurement device
AssigneeTopcon Corporation
InventorTaichi YUASA
Life of this patent
Estimating the term…
Loading patent…
AssigneeTopcon Corporation
InventorTaichi YUASA
Estimating the term…
A light source section configured to couple a plurality of laser beams having different wavelengths and emit measuring light; an illuminating section configured to illuminate a measurement target at a predetermined angle; a light receiving section configured to receive reflected measuring light from the measurement target; and a controlling section configured to compute a reflectance at each of the wavelengths, based on a light receiving result. The light source section includes: a first and a second light source configured to emit each laser beams having different wavelengths; and a dichroic mirror disposed in optical axes of the laser beams intersected, configured to combine the laser beams. The light receiving section includes: a first, a second and a third light receiving unit configured to receive the reflected measuring light from different distance. The controlling section is configured to select which of results from each light receiving unit to use.
A measurement deice comprising:
Dependencies are inferred from the claim text.