Scanning probe microscope
AssigneeOxford Instruments Asylum Research Inc
InventorsDavid A. Grigg, Deron Walters, Haigang Zhang, Jason Cleveland
Life of this patent
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Abstract
A scanning probe microscope has a probe configured to move across the surface of a sample to be monitored. A scanner, to which the probe is mounted, moves the probe across the sample surface such that the probe is deflected in accordance with the structure of the sample surface. A beam system directs a light beam at the probe during the movement of the probe across the sample surface and a detector monitors the deflection of the probe using the light beam. The arrangement is such that the scanner is physically independent of the beam system.
Claims26
A scanning probe microscope, comprising:
- a probe configured to move across the surface of a sample to be monitored;
- a scanner, to which the probe is mounted, configured to cause said movement of the probe across the sample surface such that the probe is deflected in accordance with the structure of the sample surface;
- a beam system for directing a light beam at the probe during said movement of the probe across the sample surface;
- and
- a detector for monitoring the deflection of the probe using the light beam;
- wherein the scanner is physically independent of the beam system.
Dependencies are inferred from the claim text.