Transfer apparatus and transfer method
AssigneeToshiba Kikai Kabushiki Kaisha
InventorsMitsunori KOKUBO, Takato BABA, Toshiaki GOTO
Life of this patent
Estimating the term…
Abstract
According to one embodiment, a transfer apparatus includes a coating part for coating an uncured resin on a substrate, a substrate installation part for positioning and installing the substrate integrally, a mold installation part for installing a sheet-like mold, a transfer roller for transferring a fine transfer pattern formed on the mold to the resin coated on the substrate, and a plasma unit for cleaning the mold by irradiating plasma to the mold peeled off from the resin after transferring. After cleaning by the plasma using the plasma unit, the cleaned mold is used again for transferring of the transfer pattern.
Claims16
A transfer apparatus for transferring a fine transfer pattern formed on a mold to a resin coated on a substrate, comprising:
- a coating part configured to coat the resin in an uncured state on the substrate;
- a substrate installation part configured to position and install the substrate therein integrally;
- a mold installation part configured to install the mold in a form of a sheet therein;
- a transfer roller configured to transfer the fine transfer pattern formed on the mold to the resin coated on the substrate;
- and
- a plasma unit configured to irradiate plasma to the mold peeled off from the resin after the transfer pattern formed on the mold is transferred to the resin coated on the substrate, thereby cleaning the mold;
- wherein
- the mold peeled off from the resin on the substrate is used again for transferring of the transfer pattern after being cleaned by irradiation of the plasma by the plasma unit.
A transfer apparatus for transferring a fine transfer pattern formed on a mold to a resin coated on a substrate, comprising:
- a coating part configured to coat the resin in an uncured state on the substrate;
- a substrate installation part configured to position and install the substrate therein integrally;
- a mold installation part configured to install the mold in a form of a sheet therein;
- a transfer roller configured to transfer the fine transfer pattern formed on the mold to the resin coated on the substrate;
- and
- a plasma unit configured to irradiate plasma to the substrate, wherein
- the plasma unit includes a head and a driver and
- the coating part and the plasma unit simultaneously move in relation to the substrate, and the coating part coats the resin in an uncured state on the substrate while the plasma is irradiated to the substrate by the plasma unit.
A transfer method for transferring a fine transfer pattern formed on a mold to a resin coated on a substrate, comprising:
- coating the resin in an uncured state on the substrate with use of a coating part;
- and
- irradiating plasma to the substrate with use of a plasma unit, wherein,
- the plasma unit includes a head and a driver, and
- with simultaneous movement of the coating part and the plasma unit in relation to the substrate, the resin in the uncured state is coated on the substrate at the step of coating while irradiating the plasma to the substrate at the step of irradiating.
A transfer apparatus for transferring a fine transfer pattern formed on a mold to a resin coated on a substrate, comprising:
- a coating part configured to coat the resin in an uncured state on the substrate, the resin being curable by an electromagnetic wave having a predetermined wavelength;
- a substrate installation part configured to position and install the substrate therein integrally;
- a mold installation part configured to install the mold in a form of a sheet therein;
- a plasma unit configured to irradiate plasma to the substrate;
- a transfer roller around which the mold is wound, the transfer roller being configured to perform both pressing of the mold against the resin and peeling off the mold from the resin, by roll-transferring of moving the transfer roller on condition that the transfer roller is pressing the mold against the resin;
- a resin curing part configured to irradiate the electromagnetic wave having the predetermined wavelength to the resin under condition that the transfer roller is pressing the mold against the resin of the mold;
- and
- a control unit configured to control the resin curing part so that the electromagnetic wave having the predetermined wavelength is irradiated to the resin when the transfer roller moves in a direction to press the mold against the resin by the roll-transferring.
Dependencies are inferred from the claim text.