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US 2019/0058956 A1Published application
Capacitive mems microphone and electronic apparatus
AssigneeGoertek Inc.
InventorQuanbo ZOU
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Abstract
The present invention discloses a capacitive MEMS microphone and an electronic apparatus. The capacitive MEMS microphone comprises: a diaphragm; and a substrate, wherein a cavity is formed between the diaphragm and the substrate, and the cavity is filed with an elastic body. According to an embodiment of this invention, an elastic body is adopted in a capacitive MEMS microphone to replace the air gap of the prior art such that the SNR of the microphone is increased.
Claims11
A capacitive MEMS microphone, comprising:
- a diaphragm;
- and
- a substrate,
- wherein a cavity is formed between the diaphragm and the substrate, and the cavity is filed with an elastic body.
1 more element
Dependencies are inferred from the claim text.