Launch structures for a hermetically sealed cavity
AssigneeTexas Instruments Incorporated
InventorsAdam Joseph Fruehling, Benjamin Stassen Cook, Juan Alejandro Herbsommer, Swaminathan Sankaran
Life of this patent
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Abstract
An apparatus includes a substrate containing a cavity and a dielectric structure covering at least a portion of the cavity. The cavity is hermetically sealed. The apparatus also may include a launch structure formed on the dielectric structure and outside the hermetically sealed cavity. The launch structure is configured to cause radio frequency (RF) energy flowing in a first direction to enter the hermetically sealed cavity through the dielectric structure in a direction orthogonal to the first direction. Various types of launch structures are disclosed herein.
Claims20
An apparatus, comprising:
- a substrate containing a cavity;
- a dielectric structure covering at least a portion of the cavity, wherein the cavity is hermetically sealed;
- and
- a launch structure formed on the dielectric structure and outside the hermetically sealed cavity, wherein the launch structure is configured to cause radio frequency (RF) energy flowing in a first direction to flow through the dielectric structure to the hermetically sealed cavity in a direction orthogonal to the first direction.
An apparatus, comprising:
- a substrate containing a cavity;
- a dielectric structure covering at least a portion of the cavity, wherein the cavity is hermetically sealed;
- a launch structure formed on the dielectric structure and outside the hermetically sealed cavity, wherein the launch structure is configured to cause radio frequency (RF) energy flowing in a first direction flow through the dielectric structure in a direction orthogonal to the first direction to the hermetically sealed cavity;
- and
- a transceiver electrically coupled to the launch structure and configured to inject a transmit signal into the cavity through the launch structure, to receive a receive signal from the cavity through the launch structure, and to generate an error signal based on the transmit signal and receive signal, and to dynamically adjust a frequency of the transmit signal based on the error signal.
Dependencies are inferred from the claim text.