Substrate pre-baking device
AssigneeWuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
InventorHengzhong HE
Life of this patent
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Abstract
In a substrate pre-baking device, a baking box housing includes a baking chamber in an interior space of the baking box housing, wherein an opening corresponding to a side door is arranged on a lateral side of the baking box housing. The side door is arranged at the opening of the baking box housing. A heating structure is arranged in the baking chamber. A hot air curtain device is arranged at the side door of the baking box housing. When the side door is opened, the hot air curtain device is configured to form a hot air curtain for isolating the baking chamber from outside environment at the opening of the side door.
Claims10
A substrate pre-baking device, comprising:
- a baking box housing having a baking chamber in an interior space of the baking box housing, wherein an opening corresponding to a side door is arranged on a lateral side of the baking box housing;
- the side door arranged at the opening of the baking box housing;
- a heating structure arranged in the baking chamber;
- and
- a hot air curtain device arranged at the side door of the baking box housing;
- wherein when the side door is opened, the hot air curtain device is configured to form a hot air curtain for isolating the baking chamber from an external environment at the opening of the side door.
Dependencies are inferred from the claim text.