Laser Diodes, LEDs, and Silicon Integrated sensors on Patterned Substrates
OwnerJie Piaoinventor
Life of this patent
Estimating the term…
Abstract
Patterned substrates and optoelectronic devices (UV laser diode, UV LED, and sensors grown on silicon substrate) formed on these patterned substrates are described. The method of making patterned substrates are described. Examples of making laser diodes on these patterned substrates described in detail. The PSs can be fabricated by either combination of e-beam lithography and wet-chemical etching or combination of e-beam lithography and dry etching or through Nanoimprint transfer of master mold patterns to various wafers followed by etching.
Claims17
A method comprising:
- fabricating a patterned substrate, the patterned substrate including at least one of a V-groove patterned substrate, a trapezoidal-groove patterned substrate, or a rectangular/square cuboid patterned substrate;
- fabricating a laser diode or a light emitting diode on the patterned substrate;
- and
- reducing dislocation and enhancing crystalline quality of epitaxial growth of semiconductor with the patterned substrate.
A device comprising epitaxial growth laser diode structures on a patterned substrate for reduced dislocation densities.
A device comprising:
- a structure including at least one of a V-groove patterned substrate, a trapezoidal-groove patterned substrate, and a rectangular/square cuboid patterned substrate,
- wherein the at least one patterned substrate is made from at least one of:
- Si, GaN-on-sapphire, sapphire, GaN free-standing, SiOx-on-Silicon, III-V, II-VI, or Ge.
A device comprising epitaxial growth light emitting diode structures on patterned substrates for reduced dislocation densities.
Dependencies are inferred from the claim text.