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US 2019/0058082 A1Published application
Uniform semiconductor nanowire and nanosheet light emitting diodes
AssigneeGlobalfoundries Inc.
InventorsDeepak K. NAYAK, Srinivasa R. BANNA, Ajey P. JACOB
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Abstract
The present disclosure relates to semiconductor structures and, more particularly, to uniform semiconductor nanowire and nanosheet light emitting diodes and methods of manufacture. The structure includes a buffer layer; at least one dielectric layer on the buffer layer, the at least one dielectric layer having a plurality of openings exposing the buffer layer; and a plurality of uniformly sized and shaped nanowires or nanosheets formed in the openings and extending above the at least one dielectric layer.
Claims14
A structure, comprising:
- a buffer layer;
- at least one dielectric layer on the buffer layer, the at least one dielectric layer having a plurality of openings exposing the buffer layer;
- a plurality of uniformly sized and shaped nanowires or nanosheets formed in the openings and extending above the at least one dielectric layer;
- a plurality of quantum wells surrounding sidewalls of the uniformly sized and shaped nanowires or nanosheets;
- and
- at least one material directly on sidewalls of the quantum wells,
- wherein the at least one material comprises a p-type GaN.
4 more elements
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-20. (canceled)
Dependencies are inferred from the claim text.