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US 2019/0058070 A1Published application
Backside Illuminated Photo-Sensitive Device with Gradated Buffer Layer
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYu-Hung Cheng, Chia-Shiung Tsai, Cheng-Ta Wu, Xiaomeng Chen, Yen-Chang Chu, Yeur-Luen Tu
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Abstract
A photo-sensitive device includes a uniform layer, a gradated buffer layer over the uniform layer, a silicon layer over the gradated buffer layer, a photo-sensitive light-sensing region in the uniform layer and the silicon layer, a device layer on the silicon layer, and a carrier wafer bonded to the device layer.
Claims20
A device comprising:
- a uniform layer that includes a passivation layer;
- a gradated buffer layer disposed over the uniform layer;
- a semiconductor material layer disposed over the gradated buffer layer;
- a device layer disposed over the semiconductor material layer;
- and
- a light-sensing region extending through the semiconductor material layer, the gradated buffer layer, and into the passivation layer.
3 more elements
A device comprising:
- a uniform semiconductor layer that includes a passivation layer;
- a gradated buffer semiconductor layer disposed over the uniform semiconductor layer;
- a semiconductor material layer disposed over the gradated buffer semiconductor layer;
- a device layer disposed over the semiconductor material layer;
- and
- a photosensitive region disposed within the passivation layer and extends through the gradated buffer semiconductor layer.
3 more elements
A device comprising:
- a passivation layer;
- a uniform layer disposed over the passivation layer, the uniform layer including a material having the same concentration throughout the thickness of the uniform layer;
- a gradated layer disposed over the uniform layer, the gradated layer including the material a various concentrations throughout the thickness of the gradated layer;
- a semiconductor layer disposed over the gradated layer;
- and
- a light-sensing region disposed within the passivation layer and extends through the uniform layer and the gradated layer.
3 more elements
Dependencies are inferred from the claim text.