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US 2019/0058035 A1Published application
Semiconductor Device
AssigneeSamsung Electronics Co., Ltd.
InventorsGuyoung Cho, Dae-Young Kwak, Shinhye Kim, Koungmin Ryu, Sangjin Hyun
Life of this patent
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Abstract
A semiconductor device includes active patterns protruding from a substrate and an insulation structure surrounding lower portions of the active patterns. The insulation structure includes an insulation layer conforming to a top surface of the substrate and to sidewalls of the active patterns and a buried insulation pattern on the insulation layer.
Claims20
A semiconductor device, comprising:
- active patterns protruding from a substrate;
- and
- an insulation structure surrounding lower portions of the active patterns, wherein the insulation structure comprises:
- a first line pattern covering a top surface of the substrate and to sidewalls of the active patterns;
- and
- a buried pattern on the first line pattern.
3 more elements
A semiconductor device, comprising:
- a substrate including spaced apart first regions and a second region between the first regions;
- first active patterns protruding from the substrate on a first one of the first regions;
- second active patterns protruding from the substrate on a second one of the first regions;
- and
- an insulation structure surrounding lower portions of the first and second active patterns and comprising a first line pattern conforming to a top surface of the substrate and sidewalls of the first and second active patterns and a buried pattern on the first line pattern.
2 more elements
A semiconductor device, comprising:
- an active pattern protruding from a substrate;
- and
- an insulation structure surrounding a lower portion of the active pattern wherein the insulation structure comprises:
- a first line pattern including a horizontal portion on a top surface of the substrate and a vertical portion extending from the horizontal portion onto sidewalls of the active pattern;
- and
- a buried pattern on the first line pattern.
3 more elements
Dependencies are inferred from the claim text.