X ray flat panel detector and fabrication method thereof
AssigneeBoe Technology Group Co., Ltd.
InventorHui TIAN
Life of this patent
Estimating the term…
Abstract
The present disclosure relates to an X ray flat panel detector and a fabrication method thereof. The X ray flat panel detector comprises: a substrate; a thin film transistor disposed on the substrate and configured to output a sensed signal; an insulating layer covering the thin film transistor; a photosensitive device disposed on the insulating layer to have a vertical shift with respect to the thin film transistor, and configured to absorb visible light through a quantum dot film and convert the visible light into a sensed signal; and a scintillating layer disposed on the photosensitive device and configured to convert X rays into the visible light.
Claims23
An X ray flat panel detector comprising:
- a substrate;
- a thin film transistor disposed on the substrate and configured to output a sensed signal;
- an insulating layer covering the thin film transistor;
- a photosensitive device disposed on the insulating layer to have a vertical shift with respect to the thin film transistor, and configured to absorb visible light through a quantum dot film and convert the visible light into a sensed signal;
- and
- a scintillating layer disposed on the photosensitive device and configured to convert X rays into the visible light.
A fabrication method of an X ray flat panel detector comprising:
- fabricating a thin film transistor and an insulating layer on a substrate;
- fabricating a photosensitive device on the insulating layer;
- and
- fabricating a scintillating layer on the photosensitive device.
(canceled)
(canceled)
(canceled)
Dependencies are inferred from the claim text.