Semiconductor package substrate and method for manufacturing same
AssigneeHaesung Ds Co., Ltd.
InventorsIn Seob BAE, Sung Il KANG
Life of this patent
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Abstract
A semiconductor package substrate, in which a base substrate having an upper surface and a lower surface and formed of a conductive material is filled with resin formed of an insulating material, includes a die pad formed of the conductive material on the upper surface and a lead arranged on the upper surface by being electrically separated from the die pad and comprising a bonding pad that is a wire bonding area. A protrusion protruding toward the lower surface is formed in a central area of the bonding pad. A central thickness of the bonding pad is greater than a peripheral thickness of the bonding pad.
Claims15
A semiconductor package substrate in which a base substrate having an upper surface and a lower surface and formed of a conductive material is filled with resin formed of an insulating material, the semiconductor package substrate comprising:
- a die pad formed of the conductive material on the upper surface;
- and
- a lead arranged on the upper surface by being electrically separated from the die pad and comprising a bonding pad that is a wire bonding area,
- wherein a protrusion protruding toward the lower surface is formed in a central area of the bonding pad, and a central thickness of the bonding pad is greater than a peripheral thickness of the bonding pad.
A method of manufacturing a semiconductor package substrate, the method comprising:
- forming a trench in a lower surface of a base substrate of a conductive material;
- filling the trench with resin;
- curing the resin;
- removing the resin exposed from the trench;
- and
- forming a die pad having a flat surface and a lead separated from the die pad on an upper surface of the base substrate, by patterning an opposite surface of the base substrate to expose at least a part of the resin filling the trench,
- wherein the lead comprises a bonding pad having a flat surface and a connection pattern connected to the bonding pad,
- at least a part of the trench is formed in an area corresponding to the lead, the trench has a first depth of an area corresponding to the bonding pad and a second depth of an area corresponding to the connection pattern, and the first depth is smaller than the second depth, and
- the bonding pad that is an area where a wire is bonded comprises a protrusion protruding toward the lower surface, and the central thickness of the bonding pad is greater than a peripheral thickness of the bonding pad.
A semiconductor package substrate in which a base substrate having an upper surface and a lower surface and formed of a conductive material is filled with resin formed of an insulating material, the semiconductor package substrate comprising:
- a die pad formed of the conductive material on the upper surface;
- a lead arranged on the upper surface by being electrically separated from the die pad, and comprising a bonding pad that is a wire bonding area, a connection pattern, and a lead pad;
- and
- a lead land integrally formed with the lead pad on the lower surface,
- wherein the bonding pad comprises a protrusion protruding toward the lower surface,
- the connection pattern connects the bonding pad and the lead pad, and
- a central thickness of the bonding pad is greater than a thickness of the connection pattern.
Dependencies are inferred from the claim text.