Dicing method and laser processing apparatus
AssigneeToshiba Memory Corporation
InventorsTsutomu FUJITA, Takanobu ONO
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AssigneeToshiba Memory Corporation
InventorsTsutomu FUJITA, Takanobu ONO
Estimating the term…
According to one embodiment, a dicing method is provided. The dicing method includes detecting a first distance between a first portion of a substrate and a first substrate information detection unit. The method also includes detecting a second distance between a second portion of the substrate a second substrate information detection unit, the second portion different from the first portion. Distance information is calculated between the substrate and a processing lens, which is located farther from the second substrate information detection unit than from the first substrate information detection unit, based on the detected first distance and the detected second distance, and he substrate is irradiated with laser light from the processing lens based on the distance information.
A laser processing apparatus comprising:
Dependencies are inferred from the claim text.