Three-Dimensional Image Reconstruction Method

A three-dimensional image reconstruction method of reconstructing a three-dimensional image of a specimen, the method comprising:

• alternately repeating a cross section preparation step and a sectional image acquisition step,
• the cross section preparation step prepares a cross section of the specimen by using a sectional specimen preparation device which is provided with a shielding member disposed so as to cover a part of the specimen, and which prepares a cross section at a processing position on the specimen with an ion beam, the processing position being a boundary between a portion of the specimen exposed from a linear end edge of the shielding member and a portion of the specimen covered by the shielding member;
• and
• the sectional image acquisition step acquires a sectional image of the specimen with an imaging means, and
• arranging a plurality of the acquired sectional images with an image processing device in the order in which the acquired sectional images have been captured,
• the cross section preparation step comprising:
• a specimen preparation step of attaching, on a surface of the specimen, a grid-like mark member in which rectangular openings are two-dimensionally arranged, and disposing the grid-like mark member under the shielding member so that a side of each of the rectangular openings of the grid-like mark member forms a 90-degree angle with respect to a direction in which the linear end edge of the shielding member extends;
• and
• a processing position determination step of adjusting relative positions of the shielding member and the grid-like mark member by using the grid-like mark member as an index of the processing position.