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US 2019/0056458 A1Published application
Test system
AssigneeKabushiki Kaisha Nihon Micronics
InventorOsamu ARAI
Life of this patent
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Abstract
A test system is characterized by including: a holding unit that holds a light-receiving unit receiving light emitted from a test object; and an optical path forming unit that is formed with an optical transmission path as a path of the light received by the light-receiving unit, in which the optical transmission path is formed of a different member from the light-receiving unit. Since the test system has such a configuration, replacement of the light-receiving unit that receives the light emitted from the test object can be facilitated.
Claims10
A test system comprising:
- a holding unit that holds a light-receiving unit receiving light emitted from a test object;
- and
- an optical path forming unit that is formed with an optical transmission path as a path of the light received by the light-receiving unit, wherein
- the optical transmission path is formed of a different member from the light-receiving unit.
1 more element
Dependencies are inferred from the claim text.