Plane correcting device and semiconductor testing apparatus including the same
AssigneeHermes-Epitek Corporation
InventorsPo-Ju KU, Wei-Ting CHEN
Life of this patent
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Abstract
A plane correcting device comprises a first base disposed on a test head of a semiconductor testing apparatus; a second base disposed on the prober stage of the semiconductor testing apparatus and opposite to the first base; a plurality of correcting rods disposed between the first base and the second base, wherein a protruding height of each correcting rods may be adjusted to correct the prober stage to a predetermined plane; and a plurality of fixing units disposed on the first base or the second base to fix relative position of the prober stage and the test head. The present invention also provides a semiconductor testing apparatus including the plane correcting device.
Claims14
A plane correcting device comprising
- a first base disposed on a test head of a semiconductor testing apparatus;
- a second base disposed on a prober stage of the semiconductor testing apparatus and opposite to the first base;
- a plurality of correcting rods disposed between the first base and the second base, wherein a protruding height of each correcting rod is adjustable to align the prober stage to a predetermined plane, wherein the protruding height of each correcting rod is a length of each correcting rod extends between the first base and the second base;
- and
- a plurality of fixing units disposed on the first base or the second base for fixing the relative position of the prober stage and the test head.
A semiconductor testing apparatus comprising
- a test head;
- a prober stage electrically connected with the test head;
- and
- a plane correcting device including
- a first base disposed on the test head;
- a second base disposed on the prober stage and opposite to the first base;
- a plurality of correcting rods disposed between the first base and the second base, wherein a protruding height of each correcting rod is adjustable to align the prober stage to a predetermined plane, wherein the protruding height of each correcting rod is a length of each correcting rod extends between the first base and the second base;
- and
- a plurality of fixing units disposed on the first base or the second base for fixing the relative position of the test head and the prober stage.
Dependencies are inferred from the claim text.