Micromechanical Yaw Rate Sensor and Method for Operating Same

A method for operating a micromechanical rate-of-rotation sensor having a first and second Coriolis element arranged beside one another and coupled by a coupling element to form an anti-parallel drive mode, the method comprising:

• providing a first drive beam arranged along the first Coriolis element and is coupled via a first spring to the first Coriolis element;
• providing a first drive electrode carrier extending from the first drive beam in a direction opposite to the first Coriolis element and configured to carry a multiplicity of first drive electrodes extending parallel to the first drive beam;
• and
• activating a first multiplicity of static electrodes, which mesh with the first drive electrodes, in order to drive the first and second Coriolis element in the anti-parallel drive mode.