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US 2019/0056157 A1Published application
Heat exchanger for cooling a heating tube and method thereof
AssigneeApplied Materials, Inc.
InventorsGerd HOFFMANN, Peter SKUK
Life of this patent
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Abstract
An evaporator contains a heating tube, a heat exchanger for cooling the heating tube, and a means for generating an aerosol. The heat exchanger contains at least two cooling pipes, where the at least two cooling pipes are arranged such that each of the at least two cooling pipes is in physical contact with the heating tube. The means for generating the aerosol is coupled to the at least two cooling pipes.
Claims20
An evaporator, comprising:
- a heating tube;
- a heat exchanger for cooling the heating tube, comprising:
- at least two cooling pipes, wherein the at least two cooling pipes are arranged such that each of the at least two cooling pipes is in physical contact with the heating tube;
- and
- a means for generating an aerosol coupled to the at least two cooling pipes.
2 more elements
An evaporator, comprising:
- a heating tube;
- electric heating coils for vaporizing material located inside the heating tube;
- a heat exchanger for cooling the heating tube, comprising:
- at least two cooling pipes, wherein the at least two cooling pipes are arranged such that each of the at least two cooling pipes is in physical contact with the heating tube;
- and
- a means for generating an aerosol coupled to the at least two cooling pipes.
3 more elements
Dependencies are inferred from the claim text.