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US 2019/0055949 A1Published application
Turbo-molecular pump
AssigneeShimadzu Corporation
InventorKota WATANABE
Life of this patent
Estimating the term…
Abstract
A turbo-molecular pump comprises: a shaft to be rotatably driven by a motor; a pump rotor; multiple bolts penetrating the pump rotor from a pump suction port side to fasten the pump rotor to a pump suction port side end portion of the shaft; and a seal member configured to seal a clearance between fastening surfaces of the pump rotor and the shaft or a clearance between each bolt and the pump rotor.
Claims8
A turbo-molecular pump comprising:
- a shaft to be rotatably driven by a motor;
- a pump rotor;
- multiple bolts penetrating the pump rotor from a pump suction port side to fasten the pump rotor to a pump suction port side end portion of the shaft;
- and
- a seal member configured to seal a clearance between fastening surfaces of the pump rotor and the shaft or a clearance between each bolt and the pump rotor.
2 more elements
Dependencies are inferred from the claim text.