Miniature gas control device
AssigneeMicrojet Technology Co., Ltd.
InventorsHao-Jan MOU, Hung-Hsin LIAO, Shih-Chang CHEN, Jia-Yu LIAO, Shou-Hung CHEN, Yung-Lung HAN, Wei-Ming LEE
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AssigneeMicrojet Technology Co., Ltd.
InventorsHao-Jan MOU, Hung-Hsin LIAO, Shih-Chang CHEN, Jia-Yu LIAO, Shou-Hung CHEN, Yung-Lung HAN, Wei-Ming LEE
Estimating the term…
A miniature gas control device is disclosed and includes a miniature gas transportation device and a miniature valve device. The miniature gas transportation device includes a protective film, a gas inlet plate, a resonance plate and a piezoelectric actuator stack sequentially. The miniature valve device includes a gas collecting plate, a valve film and a gas outlet plate stacked sequentially. By driving the piezoelectric actuator of the miniature gas transportation device, the gas flows into the miniature gas transportation device from the gas inlet plate, then the gas flows into the miniature valve device through the resonance plate, and the valve opening of the valve film is selectively opened or closed in response to a direction of the gas unidirectionally flowing among the perforations and chambers of the gas collection plate and the gas outlet plate, so as to perform a pressurizing operation and a pressure-releasing operation selectively.
A miniature gas control device, comprising:
A miniature gas control device, comprising:
Dependencies are inferred from the claim text.