Shower head and vacuum processing apparatus

A vacuum processing apparatus, comprising:

• a vacuum chamber capable of maintaining a depressurized state;
• a shower head including a head body having an inner space and a shower plate including a plurality of gas injecting ports, a gas injecting surface, and a plurality of hole portions, the plurality of gas injecting ports being communicated with the inner space, gas being injected from the plurality of gas injecting ports on the gas injecting surface, and the plurality of hole portions being disposed on the gas injecting surface, and surface areas of the plurality of hole portions being radially gradually increased from a center of the gas injecting surface;
• and
• a support facing the shower head and capable of supporting a substrate.