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US 2019/0055650 A1Published application
Iridium Precursors for ALD and CVD Thin Film Deposition and Uses Thereof
AssigneeApplied Materials, Inc.
InventorThomas Knisley
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Abstract
Metal coordination complexes comprising an iridium atom coordinated to at least one diazabutadiene based ligand having a structure represented by: where R1 and R4 are independently selected from the group consisting of C1-C4 alkyl and amino groups, and each of R2 and R3 are independently selected from the group consisting of H, C1-C3 alkyl, or amino groups are described. Processing methods using the metal coordination complexes are also described.
Claims14
A metal coordination complex of the general formula Ir(DAD0)aXdYe , wherein:
- DAD0 is a neutral diazadiene based ligand
- where R1 and R4 are independently selected from the group consisting of C1-C4 alkyl and amino groups;
- each of R2 and R3 are independently selected from the group consisting of H, C1-C3 alkyl, or amino groups;
- X is an anionic ligand;
- Y is a neutral ligand not based on DAD;
- and
- a is 1-4, d is 0-8, and e is 0-8,
- with the proviso that where Y is CO, a is not 1.
5 more elements
A metal coordination complex of the general formula Ir(DAD2)cXdYe , wherein:
- DAD2 is a dianionic diazadiene based ligand
- where R1 and R4 are independently selected from the group consisting of C1 -C4 alkyl and amino groups;
- each of R2 and R3 are independently selected from the group consisting of H, C1-C3 alkyl, or amino groups;
- X is an anionic ligand not based on DAD or a univalent DAD based ligand;
- Y is a neutral ligand not based on DAD or a neutral DAD based ligand;
- and
- c is 1-4, d is 0-8 and e is 0-8.
4 more elements
Dependencies are inferred from the claim text.