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US 2019/0055469 A1Published application
Dry etching composition and dry etching composition-filled container
AssigneeZeon Corporation
InventorMunehiro HYAKUTAKE
Life of this patent
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Abstract
The objective is to inhibit fluorinated saturated hydrocarbon decomposition during storage or use of a dry etching composition containing a fluorinated saturated hydrocarbon in high concentration. A dry etching composition contains 99 volume % or more of a fluorinated saturated hydrocarbon and further contains an amine compound. The dry etching composition is preferably an azeotropic composition or an azeotrope-like composition.
Claims8
A dry etching composition comprising:
- 99 volume % or more of a fluorinated saturated hydrocarbon;
- and
- an amine compound.
Dependencies are inferred from the claim text.