Method for Purifying Fluorine Gas

A method for purifying a fluorine gas by removing a metal component from a fluorine gas, wherein the fluorine gas contains hydrogen fluoride and at least one metal component selected from the group consisting of Fe, Cr, Mn, Co, Ti, Mo, Cu and Ni, the method comprising the step of:

• removing the hydrogen fluoride and the metal component by bringing the fluorine gas into contact with at least one solid metal fluoride selected from the group consisting of lithium fluoride, sodium fluoride, potassium fluoride, magnesium fluoride, calcium fluoride and barium fluoride, to adsorb the hydrogen fluoride and the metal component on the metal fluoride,
• wherein a content of the hydrogen fluoride in the fluorine gas before the removing step is 50 volume ppm or greater to 1 volume % or less, relative to a total volume of the fluorine gas, the hydrogen fluoride and the metal component, and
• wherein a content of each of Fe, Cr, Mn, Co, Ti, Mo, Cu and Ni contained in the fluorine gas after the removing step is 10 mass ppb or less.

A method for manufacturing a purified fluorine gas by removing a metal component contained in a fluorine gas, comprising the step of:

• removing hydrogen fluoride and the metal component by bringing the fluorine gas containing the hydrogen fluoride and the metal component into contact with a solid metal fluoride to adsorb the hydrogen fluoride and the metal component on the metal fluoride,
• wherein a content of the hydrogen fluoride in the fluorine gas before the removing step is 50 volume ppm or greater to 1 volume % or less, relative to a total volume of the fluorine gas, the hydrogen fluoride and the metal component.