Dsr speaker elements and methods of manufacturing thereof

A piezo-electric actuator comprising:

• a substrate,
• at least a central moving element;
• a plurality of peripheral flexure benders, each flexure bender comprising at least one electrode and at least a piezoelectric material layer, wherein said at least one electrode is split into at least two different sub-electrodes.
• the flexure benders being connected to said moving element and being configured to move said moving element along an axis perpendicular to a moving element surface, in response to an electrical stimulus applied to said at least one electrode.

A method of forming a piezo-electric actuator, the method comprising:

• providing a substrate base;
• disposing a sacrificial layer on at least part of said substrate base;
• disposing a first electrode layer on at least part of said sacrificial layer;
• disposing a first piezoelectric material layer on said first electrode layer and on at least part of the sacrificial layer,
• forming gaps in the first piezoelectric material layer, to define:
• at least one peripheral flexure bender comprising a portion of said first electrode layer and at least one electrode comprising a portion of said first piezoelectric material layer, wherein at least one of said electrodes is split into at least two different sub-electrodes, and
• a central moving element comprising another portion of said first piezoelectric material layer,
• wherein said flexure bender is connected to said moving element, for moving said moving element in response to an electrical stimulus applied to said electrodes.

A method of forming a piezo-electric actuator, the method comprising:

• providing a substrate base;
• disposing a sacrificial layer on said substrate base;
• disposing a first electrode layer on said sacrificial layer;
• disposing a first piezoelectric material layer on at least part of said first electrode layer,
• disposing a moving element layer comprising a material different from a piezoelectric material;
• forming gaps on each side of a section comprising a portion of the first electrode layer and a portion of the first piezoelectric material layer, to define:
• at least one peripheral flexure bender comprising said portion of said first electrode layer and at least one electrode comprising said portion of the first piezoelectric material layer, wherein the at least one electrode is divided into a plurality of sub-electrodes, and
• a central moving element comprising a material different from a piezoelectric material,
• wherein said flexure bender is connected to said moving element, for moving said moving element in response to an electrical stimulus applied to said at least one electrode.