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US 2019/0035599 A1Published application
System and Method for Performing Nano Beam Diffraction Analysis
AssigneeInternational Business Machines Corporation
InventorsMarc Adam BERGENDAHL, James John DEMAREST, Christopher J. PENNY, Roger Allen QUON, Christopher Joseph WASKIEWICZ
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Abstract
A system for performing diffraction analysis, includes a mill for removing a surface portion of a sample, and an analyzer for performing diffraction analysis on the milled sample.
Claims20
A system for performing diffraction analysis, comprising:
- a mill for removing a surface portion of a sample;
- and
- an analyzer for performing diffraction analysis on the milled sample.
A method of performing diffraction analysis, comprising:
- removing a surface portion of a sample;
- and
- performing diffraction analysis on the removed surface portion of the prepared sample.
A method of performing strain analysis, comprising:
- acquiring diffraction data for a sample;
- acquiring reference diffraction data for a reference sample;
- and
- comparing the diffraction data with the reference diffraction data to determine an amount of strain in the sample.
1 more element
Dependencies are inferred from the claim text.