Imprint apparatus, imprint method, and article manufacturing method

An imprint apparatus that forms a pattern on a substrate by bringing a mold into contact with an imprint material arranged on the substrate and curing the imprint material, the apparatus comprising:

• a mold holder configured to hold the mold;
• a substrate holder configured to hold the substrate;
• a dispenser configured to arrange the imprint material on the substrate;
• and
• a scope configured to capture an image of a mark,
• wherein the substrate holder includes a reference plate which has a reference mark whose image is captured by the scope, the reference mark includes a portion in which a base material of the reference plate is covered with an electrically conductive reflector and a plurality of mark portions in which the base material is exposed, each of the mark portion is surrounded by electrically conductive reflector, each of the mark portion has cross-shaped portion and a portion arranged around the cross-shaped portion, and the plurality of mark portions are arranged so as not to point-contact each other.

An imprint apparatus that forms a pattern on a substrate by bringing a mold into contact with an imprint material arranged on the substrate and curing the imprint material, the apparatus comprising:

• a mold holder configured to hold the mold;
• a substrate holder configured to hold the substrate;
• a dispenser configured to arrange the imprint material on the substrate;
• and
• a scope configured to capture an image of a mark,
• wherein the substrate holder includes a reference plate which has a reference mark whose image is captured by the scope, and the reference mark includes an electrically conductive reflector and a transparent electrically conductive film configured to cover the electrically conductive reflector.