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US 2018/0340800 A1Published application
Encoder apparatus, drive apparatus, stage apparatus, and robot apparatus
AssigneeNikon Corporation
InventorMasahiko GOTO
Life of this patent
Estimating the term…
Abstract
Provided is an encoder apparatus capable of reducing frequency of maintenance of a battery. An encoder apparatus includes: a position detection system including a detector that detects position information on a mover; an electric signal generator that generates an electric signal in response to movement of the mover; and a battery that supplies at least a part of power consumed by the position detection system in accordance with the electric signal generated by the electric signal generator.
Claims32
An encoder apparatus, comprising:
- a position detection system including a detector that detects position information on a mover;
- an electric signal generator that generates an electric signal in response to movement of the mover;
- and
- a battery that supplies at least a part of power consumed by the position detection system in accordance with the electric signal generated by the electric signal generator.
1 more element
An encoder apparatus, comprising:
- a position detector that detects position information on a mover by supply of power;
- and
- a signal generator that outputs a signal in response to movement of the mover, wherein
- power is supplied to the position detector based on the output signal.
1 more element
Dependencies are inferred from the claim text.