Encoder apparatus, drive apparatus, stage apparatus, and robot apparatus
AssigneeNikon Corporation
InventorMasahiko GOTO
Life of this patent
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Abstract
Provided is an encoder apparatus that is free from battery maintenance or has low frequency of battery maintenance. The encoder apparatus includes: a position detection system including: a scale; a light emitter that irradiates the scale with light; a light detector that changes a relative position thereof with the scale in response to movement of a mover; and a detector that detects position information on the mover based on a detection result of the light detector. The encoder apparatus also includes an electric signal generator that generates an electric signal in response to the movement of the mover; and a light emission adjuster that adjusts emission of light from the light emitter based on the electric signal.
Claims25
An encoder apparatus, comprising:
- a position detection system comprising:
- a scale;
- a light emitter that irradiates the scale with light;
- a light detector that changes a relative position thereof with the scale in response to movement of a mover;
- and
- a detector that detects position information on the mover based on a detection result of the light detector;
- an electric signal generator that generates an electric signal in response to the movement of the mover;
- and
- a light emission adjuster that adjusts emission of light from the light emitter based on the electric signal.
An encoder apparatus, comprising:
- a detection system that optically detects position information on a scale and that changes a relative position thereof with the scale in response to movement of a mover;
- a signal generator that outputs a signal in response to the movement of the mover;
- and
- an adjuster that controls operation of the detection system based on the signal.
Dependencies are inferred from the claim text.